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Mechanisms of material removal and surface formation in ultraprecision machining of polycrystalline zinc selenide (本文)

Huang, Weihai 慶應義塾大学

2021.09.21

概要

Polycrystalline zinc selenide (p-ZnSe) is a typical infrared optical material that has been widely used in the fabrication of lenses for night vision systems of autonomous vehicles and windows of high-power carbon dioxide lasers, etc. p-ZnSe possesses a much lower hardness, but at the same time exhibit higher brittleness, compared to silicon; also, it consists of crystal grains with various orientations. Therefore, p-ZnSe is a difficult-to-machine material. Unless strictly controlled conditions are applied, it is difficult to avoid surface damage caused by the brittle fracture of p-ZnSe during machining. Meanwhile, owing to the acute toxicity of p-ZnSe, chips generated from the removal processes must be well collected to prevent health hazards and environmental pollution. The overall purposes of this thesis are to understand the material removal and surface formation mechanisms in ultraprecision machining of p-ZnSe when using different shapes of cutting tools, and to propose a chips-free processing method for machining p-ZnSe.

For those purposes, four types of diamond tools including two round-nosed diamond tools, a V-shaped diamond tool, a Berkovich-type diamond indenter, and a spherical diamond tip, are used to machine p-ZnSe. The deformation behavior associated with the orientation of crystal grain and the subsurface microstructural changes of p-ZnSe are investigated for each condition with the help of electron backscatter diffraction (EBSD) technique and Raman spectroscopy.

In the first part of this thesis, two round-nosed diamond tools with nose radii of 1 mm (hereinafter, referred to as R1 tool) and 10 mm (hereinafter, referred to as R10 tool) are used for cutting p-ZnSe, and the fundamental machining characteristics, including surface topography, chip morphology, material microstructural change, and cutting forces are examined. The brittle fracture in terms of submicron-scale pits could be restrained by altering the tool from negative rake to zero rake. A crack-free machined surface is obtained by using the R10 tool. The minimal surface roughness is dominated by the grain boundary steps which tend to form along the twin boundaries that form large angles to the cutting path. The chips produced by both diamond tools have all detected phase transformation, while the phase transformation of the machined workpiece surface is depending on the nose radius of the tool.

In the second part of this thesis, a V-shaped diamond tool is used for creating micro V- shaped grooves on p-ZnSe. The formation of surface defects is strongly dependent on the angle between the groove surface and the cleavage plane of crystal grains. Pre-coating using photosensitive resin on the workpiece surface is conducted to prevent crack generation at the edge of the groove. The effects of the coating layer are numerically analyzed by simulating the stress states in the workpiece using a finite element method (FEM).

In the third part of this thesis, a Berkovich-type diamond indenter is used to perform nanoscratching tests on p-ZnSe. The p-ZnSe is subjected to single and repeated nanoscratching tests in face-forward (FF) and edge-forward (EF) directions. The morphological features of the scratched grooves and the subsurface microstructural changes of the material are characterized. Fishbone-like patterns were observed in the scratched grooves under all conditions, while no phase transformation was detected. However, the residual stresses in the subsurface of the grooves scratched in the FF direction and the EF direction show tensile stress and compressive stress, respectively. Layer separation, i.e., a large thin layer of material peels off from the bulk, is observed in the repeated nanoscratching in the FF direction.

In the fourth part of this thesis, a spherical diamond tip is used to perform the burnishing process on p-ZnSe. Through the burnishing process, p-ZnSe is plastically deformed without chip generation. The local deformation behaviors and subsurface damage formation mechanisms are investigated under dry and oil-lubricated conditions. Phase transformation could be hardly detected in the subsurface, but lattice distortion occurred in the subsurface layer. Two types of micropatterns are created on the p-ZnSe surface by burnishing.

The findings from this thesis will not only assist in understanding the material deformation behaviors of p-ZnSe associated with crystal orientation when using different shapes of diamond tools but also demonstrate the possibility of manufacturing microstructured surfaces on various toxic brittle polycrystalline materials without chip generation.

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