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大学・研究所にある論文を検索できる 「Local stress control to suppress dislocation generation for pseudomorphically grown AlGaN UV-C laser diodes」の論文概要。リケラボ論文検索は、全国の大学リポジトリにある学位論文・教授論文を一括検索できる論文検索サービスです。
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Local stress control to suppress dislocation generation for pseudomorphically grown AlGaN UV-C laser diodes

Kushimoto, Maki Zhang, Ziyi Yoshikawa, Akira Aoto, Koji Honda, Yoshio Sasaoka, Chiaki Schowalter, Leo J. Amano, Hiroshi 名古屋大学

2022

概要

Previously reported UV-C laser diodes (LD) structures have been subject to design constraints owing to dark line defects at the edge of the mesa stripe after device fabrication. To address this issue, a detailed analysis revealed that the dark line defects were dislocations generated by local residual shear stresses associated with mesa formation on highly strained epitaxial layers. A technique for controlling the local concentration of shear stress, using a sloped mesa geometry, was proposed based on the insights gained by modeling the stress distribution at the edge of the mesa stripe. Experimental results showed that this technique succeeded in completely suppressing the emergence of dark-line defects. This technique will be useful in improving the performance of pseudomorphic AlGaN/AlN-based optoelectronic device including UV-C LDs.

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参考文献

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