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Figure captions
Fig. 1 : (Color online) Structure of MIS capacitors fabricated in this study.
Fig. 2 : (Color online) C-V curves of the capacitors without PMA for (a) c- and (b) m-
planes. The dotted line indicates an ideal C-V curve. The insets show the
magnified C-V curves in the depletion bias conditions.
Fig. 3 : (Color online) C-V curves of the capacitors with PMA for (a) c- and (b) m-planes.
The insets show the magnified C-V curves in the depletion bias conditions.
Fig. 4 : (Color online) G-V curves for the capacitors with PMA for the c- and m-planes.
Fig. 5 : (Color online) Energy distributions of Dit for the capacitors.
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14
Figures
10
11
12
13
14
15
Ni/Au
ALD-Al2O3 50nm
n-GaN : Si
4×1016 cm−3
5µm
c- or m-plane
n+-GaN sub.
16
17
Ti/Al/Ti/Au
18
Fig. 2
19
Y. Ando et al.
20
21
22
23
24
15
200
200
13
14
120
150
CFB
100
100
50
-3.5
-3
-2.5
1MHz
100kHz
10kHz
1kHz
50
Ideal
15
16
Capacitance [nF/cm 2]
12
Capacitance [nF/cm 2]
10
11
(b) m-plane
(a) c-plane
-7.5
-5
-2.5
120
150
100
CFB
100
50
-2
-1.5
1MHz
100kHz
10kHz
1kHz
50
Ideal
-7.5
2.5
-5
-2.5
Voltage [V]
Voltage [V]
17
Fig. 3
18
Y. Ando et al.
19
20
21
22
23
16
2.5
200
13
14
150
100
FB
100
50
-0.5
0.5
50
Ideal
15
1MHz
100kHz
10kHz
1kHz
120
150
100
CFB
100
50
0.5
1.5
50
Ideal
1MHz
100kHz
10kHz
1kHz
-5
16
(b) m-plane PMA
120
Capacitance [nF/cm 2]
12
Capacitance [nF/cm 2]
10
11
200
(a) c-plane PMA
-2.5
2.5
-5
Voltage [V]
-2.5
Voltage [V]
17
18
Fig. 4
19
Y. Ando et al.
20
21
22
23
24
17
2.5
12
10kHz
10
10
12
13
14
15
GP [nS]
11
c-plane
PMA
m-plane
PMA
16
17
18
-5
-2.5
Voltage [V]
19
20
Fig. 5
21
Y. Ando et al.
22
23
24
18
2.5
12
10
c-plane
m-plane
10
11
12
13
14
Dit [eV-1cm-2]
before PMA
11
10
15
PMA
16
10
17
18
10
-0.5
-0.4
-0.3
E-EC [eV]
19
20
Fig. 6
21
Y. Ando et al.
22
23
24
19
-0.2
-0.1
...
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