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Highly stretchable sensing array for independent detection of pressure and strain exploiting structural and resistive control

Ryosuke Matsuda Satoru Mizuguchi Fumika Nakamura Takuma Endo Yutaka Isoda Go Inamori Hiroki Ota W1430528435 横浜国立大学

2020.07.29

概要

Stretchable physical sensors are crucial for the development of advanced electrical systems, particularly wearable devices and soft robotics. Currently available stretchable sensors that detect both pressure and strain are based on piezoelectric, piezoresistive, or piezocapacitive effects. The range of pressure sensing is 1–800 kPa with large deformations being within the range of deformations of parts of the human body, such as elbows and knees. However, these devices cannot easily allow simultaneous and independent detection of pressure and strain with sensor arrays at large tensions (> 50%) because strain affects the pressure signal. In this study, we propose a monolithic silicone-based array of pressure and strain sensors that can simultaneously and independently detect the in-plane biaxial tensile deformation and pressure. To realize these functionalities, the deformation of the device structure was optimized using a hetero-silicone substrate made of two types of silicone with different hardness characteristics and porous silicone bodies. In addition, the resistances of the sensors were controlled by adjusting a mixture based on carbon nanoparticles to improve the sensitivity and independence between the pressure and strain sensors. These concepts demonstrate the potential of this approach and its compatibility with the current architectures of stretchable physical sensors.

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Acknowledgements

This work was supported by the Japan Science and Technology Agency, PRESTO Grant Number JPMJPR18J2,

Takeda Science Foundation, Life Science Research Grants, MIC/SCOPE (Number: 181603007), research grants

from KIOXIA Corporation (former Toshiba Memory Corporation) and Ogasawara research grant. H.O. acknowledges support from a Grant-in-Aid for Young Scientists (A) and Grant-in-Aid for Challenging Exploratory

Research provided by the Japan Society for the Promotion of Science. We would like to thank Editage (www.

edita​ge.com) for English language editing.

Author contributions

R.M., F.N. and H.O. conceived the idea. R.M. and F.N. contributed towards device design and fabrication. S.M.,

T.E. and R.M. contributed towards the material design and fabrication. Y.I., G.I. and R.M. assisted circuit design

and set-up. R.M. and H.O. wrote the paper and all other authors provided input. F.N.’s wrist was participated in

Fig. 4. R.M.’s wrist was participated in the demonstration video.

Competing interests The authors declare no competing interests.

Additional information

Supplementary information is available for this paper at https​://doi.org/10.1038/s4159​8-020-69689​-2.

Correspondence and requests for materials should be addressed to H.O.

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