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Ultra-compact VCSEL scanner for high power solid-state beam steering

SHANTING HU XIAODONG GU AHMED HASSAN RUIXIAO LI MASANORI NAKAHAMA SATOSHI SHINADA FUMIO KOYAMA 東京工業大学 DOI:https://doi.org/10.1364/OE.453090

2022.03.14

概要

We demonstrate the lateral monolithic integration of a tunable first-order surface- grating loaded vertical-cavity surface-emitting laser (VCSEL) and slow-light waveguide with fan-beam steering and amplifier function. Shallow Bragg-grating formed on the surface of a VCSEL section enables the selection of a single slow-light mode, which can be coupled into the integrated long waveguide and amplified through pumping the amplifier above threshold. We obtained over 3W amplified slow-light power with single-mode operation and over 4W amplified quasi-single-mode power under pulsed current injection. To the best of our knowledge, this is the highest output power for single-mode VCSELs. Solid-state beam steering of the device is also demonstrated with 9° fan-beam steering range and 200 resolution points.

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